Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope

Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope

Author(s):

Chang, S.-C.S. ( Delphi Research Labs. (USA) )
Putty, M.W. ( Delphi Research Labs. (USA) )

Publication title:

MEMS/MOEMS Components and Their Applications II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5717

Pub. Year:

2005

Page(from):

142

Page(to):

154

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456915 [0819456918]

Language:

English

Call no.:

P63600/5717

Type:

Conference Proceedings

Details

TDL ID:	ZA00014934
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.01.25

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