Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation

Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation

Author(s):

Stalford, H.L. ( Sandia National Labs. (USA) and Univ. of Oklahoma (USA) )
Epp, D.S. ( Sandia National Labs. (USA) )

Publication title:

MEMS/MOEMS Components and Their Applications II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5717

Pub. Year:

2005

Page(from):

71

Page(to):

78

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456915 [0819456918]

Language:

English

Call no.:

P63600/5717

Type:

Conference Proceedings

Details

TDL ID:	ZA00014934
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.01.25

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