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Novel characterization method for MEMS devices

Author(s):
  • Shaporin, A.V. ( Chemnitz Univ. of Technology (Germany) )
  • Hanf, M. ( Chemnitz Univ. of Technology (Germany) )
  • Doetzel, W. ( Chemnitz Univ. of Technology (Germany) )
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5716
Pub. Year:
2005
Page(from):
198
Page(to):
206
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
Language:
English
Call no.:
P63600/5716
Type:
Conference Proceedings

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