Long-term reliability of single-crystal silicon thin films: the influence of environment on the fatigue damage accumulation rate

Long-term reliability of single-crystal silicon thin films: the influence of environment on the fatigue damage accumulation rate

Author(s):

Pierron, O.N. ( The Pennsylvania State Univ. (USA) )
Muhlstein, C.L. ( The Pennsylvania State Univ. (USA) )

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5716

Pub. Year:

2005

Page(from):

141

Page(to):

150

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456908 [081945690X]

Language:

English

Call no.:

P63600/5716

Type:

Conference Proceedings

Details

TDL ID:	ZA00014933
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2005 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.24-2005.01.25

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