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Characterization of (near) hermetic zero-level packages for MEMS (Invited Paper)

Author(s):
De Moor, P. ( IMEC (Belgium) )
Baert, K. ( IMEC (Belgium) )
De Wolf, L. ( IMEC (Belgium) )
Jourdain, A. ( IMEC (Belgium) )
Tilman, H.A.C. ( IMEC (Belgium) )
Witvrouw, A. ( IMEC (Belgium) )
Van Hoof, C.A. ( IMEC (Belgium) )
2 more
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5716
Pub. Year:
2005
Page(from):
26
Page(to):
35
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
Language:
English
Call no.:
P63600/5716
Type:
Conference Proceedings

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