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Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS

Author(s):
Publication title:
Micromachining and Microfabrication Process Technology X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5715
Pub. Year:
2005
Page(from):
159
Page(to):
166
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456892 [0819456896]
Language:
English
Call no.:
P63600/5715
Type:
Conference Proceedings

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