MEMS fabrication process management environment
- Author(s):
- Popp, J. ( Univ, of Siegen (Germany) )
- Schmidt, T. ( Univ, of Siegen (Germany) )
- Wagener, A. ( Univ, of Siegen (Germany) )
- Hahn, K. ( Univ, of Siegen (Germany) )
- Publication title:
- Micromachining and Microfabrication Process Technology X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5715
- Pub. Year:
- 2005
- Page(from):
- 148
- Page(to):
- 158
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456892 [0819456896]
- Language:
- English
- Call no.:
- P63600/5715
- Type:
- Conference Proceedings
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