Blank Cover Image

Backside sample preparation with laser-enhanced chemical etching for infrared photon imaging

Author(s):
Deng, Q. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Mai, Z. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
He, R. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Tao, T. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Lam, J. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Lu, Y.F. ( Univ. of Nebraska/Lincoln (USA) )
1 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
432
Page(to):
435
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nanolithography by tip-enhanced laser irradiation

Mai,Z.H., Lu,Y.F., Song,W.D., Chim,W.K

SPIE - The International Society for Optical Engineering
7 Conference Proceedings 3D backside sample preparation for radiation testing

Desplats, R., Bezerra, F., Beaudouin, F., Perdu, P.

ESA Publications Division
2 Conference Proceedings Ion-source-assisted pulsed-laser deposition of carbon nitride thin films

He,Z.F., Lu,Y.F., Mai,Z.H., Ren,Z.M.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings LASER INDUCED WET-CHEMICAL ETCHING OF Mn-Zn FERRITE IN H3PO4

Lu, Y.F., Takai, M., Nagatomo, S., Namba, S.

Materials Research Society
3 Conference Proceedings Ion-source-assisted pulsed laser deposition of carbon nitride thin films

He,Z.F., Lu,Y.F., Mai,Z.H., Ren,Z.M.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings HIGH-RATE ETCHING OF Mn-Zn FERRITE BY LASER-INDUCED CHEMICAL REACTION IN CCl2F2 ATMOSPHERE

Lu, Y.F., Takai, M., Nagatomo, S., Namba, S.

Materials Research Society
4 Conference Proceedings LASER INDUCED CHEMICAL ETCHING OF COMPOSITE STRUCTURE OF FERRITE AND SENDUST

Nagatomo, S., Takai, M., Lu, Y.F., Namba, S.

Materials Research Society
10 Conference Proceedings Numerical prediction of etched profile in pyrolytic laser etching

Wee,T.S., Lu,Y.F., Chim,W.K.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Surface and optical properties of nanocrystalline GaN thin films on sapphire(OOO1)by pulsed laser deposition

Ni,H.Q., Lu,Y.F., Teng,J.H., Jie,Y.X., Mai,Z.H., Ren,Z.M.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Laser-induced temperature-rise measurement by infrared imaging

Gu,J., #NAME?, Lam,Y.-L., Zheng,Q., Wel,X.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings CONTROL OF ETCHING IN LASER-CHEMICAL REACTION OF Mn-Zn FERRITE BY MeV ION IMPLANTATION

Lu, Y.F., Takai, M., Sanda, H., Chayahara, A., Satou, M., Minamisono, T., Namba, S.

Materials Research Society
12 Conference Proceedings Near-field enhanced laser-assisted deposition

Shi, J., Lu, Y.F., Chen, X.Y., Cherukuri, R.S., Mendu, K.K., Batta, N.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12