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Surface microfabrication of silica glass by LIBWE using DPSS-UV laser

Author(s):
  • Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Sato, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Kurosaki, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
270
Page(to):
275
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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