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Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks

Author(s):
Chapman, G.H. ( Simon Fraser Univ. (Canada) )
Dykes, J. ( Simon Fraser Univ. (Canada) )
Poon, D. ( Simon Fraser Univ. (Canada) )
Choo, C. ( Simon Fraser Univ. (Canada) )
Wang, J. ( Simon Fraser Univ. (Canada) )
Peng, J. ( Simon Fraser Univ. (Canada) )
Tu, Y. ( Simon Fraser Univ. (Canada) )
2 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
247
Page(to):
258
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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