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Reference-free detection of semiconductor assembly defect

Author(s):
  • Ng, A. N. Y. ( Univ. of Hong Kong (Hong Kong China) )
  • Lam, E. Y. ( Univ. of Hong Kong (Hong Kong China) )
  • Chung, R. ( Chinese Univ. of Hong Kong (Hong Kong China) )
  • Fung, K. S. M. ( ASM Assembly Automation Ltd. (Hong Kong China) )
  • Leung, W. H. ( ASM Assembly Automation Ltd. (Hong Kong China) )
Publication title:
Machine Vision Applications in Industrial Inspection XIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5679
Pub. Year:
2005
Page(from):
27
Page(to):
35
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456526 [0819456527]
Language:
English
Call no.:
P63600/5679
Type:
Conference Proceedings

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