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The influence of physical characteristics on ablation effects in UV laser assisted micro-engineering

Author(s):
  • Ostendorf, A. ( Laser Zentrum Hannover e. V. (Germany) )
  • Kulik, C. ( Laser Zentrum Hannover e. V. (Germany) )
  • Temme, T. ( Laser Zentrum Hannover e. V. (Germany) )
  • Otte, F. ( Laser Zentrum Hannover e. V. (Germany) )
  • Samm, K. ( Laser Zentrum Hannover e. V. (Germany) )
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
638
Page(to):
643
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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