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Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power

Author(s):
  • Maeda, J. ( Mitsubishi Cable Industries, Ltd. (Japan) )
  • Sawada, H. ( Mitsubishi Cable Industries, Ltd. (Japan) )
  • Yoshida, M. ( Mitsubishi Cable Industries, Ltd. (Japan) )
  • Fujita, M. ( Mitsubishi Cable Industries, Ltd. (Japan) )
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
501
Page(to):
506
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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