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PLD of high-k dielectric films on silicon

Author(s):
  • Ratzke, M. ( Brandenburgische Technische Univ. Cottbus(Germany) )
  • Kappa, M. ( Brandenburgische Technische Univ. Cottbus(Germany) )
  • Wolfframm, D. ( Siltronic AG(Germany) )
  • Kouteva-Arguirova, S. ( Brandenburgische Technische Univ. Cottbus(Germany) )
  • Reif, J. ( Brandenburgische Technische Univ. Cottbus(Germany) )
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
406
Page(to):
411
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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