Nanomachining of inorganic transparent materials using an x-ray exciton method
- Author(s):
Makimura, T. ( Univ. of Tsukuba(Japan) ) Kenmotsu, Y. ( Univ. of Tsukuba(Japan) ) Miyamoto, H. ( Univ. of Tsukuba(Japan) ) Mori, M. ( Japan Atomic Energy Research Institute(Japan) ) Kondo, K. ( Osaka Univ. (Japan) ) Murakami, K. ( Univ. of Tsukuba(Japan) ) - Publication title:
- Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5662
- Pub. Year:
- 2004
- Page(from):
- 107
- Page(to):
- 112
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456236 [0819456233]
- Language:
- English
- Call no.:
- P63600/5662
- Type:
- Conference Proceedings
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