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Crack-free laser direct-writing on quartz and glass for microfluidic chip development

Author(s):
  • Yen, M. -H. ( Research Ctr. for Applied Sciences(Taiwan), National Taiwan Univ. (Taiwan) )
  • Cheng, J. -Y. ( Research Ctr. for Applied Sciences(Taiwan) )
  • Wei, C. -W. ( Research Ctr. for Applied Sciences(Taiwan), National Taiwan Univ. (Taiwan) )
  • Chuang, Y. -C. ( Research Ctr. for Applied Sciences(Taiwan) )
  • Young, T. -H. ( National Taiwan Univ. (Taiwan) )
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
101
Page(to):
106
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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