Microshutter array development for the James Webb space telescope (Invited Paper)

Author(s):

Li, M. J. ( NASA Goddard Space Flight Ctr. (USA) )

Acuna, N. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

Amatucci, E. ( NASA Goddard Space Flight Ctr. (USA) )

Beamesderter, M. ( NASA Goddard Space Flight Ctr. (USA) )

Baucarut, R. A. ( NASA Goddard Space Flight Ctr. (USA) )

Babu, S. ( NASA Goddard Space Flight Ctr. (USA) )

Bajikar, S. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

Ewin, A. J. ( NASA Goddard Space Flight Ctr. (USA) )

Fettig, R. ( NASA Goddard Space Flight Ctr. (USA) and Raythean Carp. (USA) )

Franz, D. E. ( NASA Goddard Space Flight Ctr. (USA) and Raythean Carp. (USA) )

Hess, L. ( NASA Goddard Space Flight Ctr. (USA) and Raythean Carp. (USA) )

Hu, R. ( NASA Goddard Space Flight Ctr. (USA) and Raythean Carp. (USA) )

Jhabvala, M. D. ( NASA Goddard Space Flight Ctr. (USA) )

Kelly, D. ( NASA Goddard Space Flight Ctr. (USA) and QSS Graup, Inc. (USA) )

King, T. T. ( NASA Goddard Space Flight Ctr. (USA) )

Kletetschka, G. ( NASA Goddard Space Flight Ctr. (USA) and The Catholic Univ. of America (USA) )

Katechi, C. A. ( NASA Goddard Space Flight Ctr. (USA) )

Kutyrev, A. ( NASA Goddard Space Flight Ctr. (USA) and Raytheon Carp. (USA) )

Loughlin, J. P. ( NASA Goddard Space Flight Ctr. (USA) )

Lynch, B. A. ( NASA Goddard Space Flight Ctr. (USA) and Raytheon Carp. (USA) )

Moseley, H. ( NASA Goddard Space Flight Ctr. (USA) )

Mott, B. ( NASA Goddard Space Flight Ctr. (USA) )

Newell, B. ( NASA Goddard Space Flight Ctr. (USA) and Orbital Science Carp. (USA) )

Oh, L. ( NASA Goddard Space Flight Ctr. (USA) and Raytheon Carp. (USA) )

Rapchun, D. A. ( NASA Goddard Space Flight Ctr. (USA) and Raytheon Carp. (USA) )

Ray, C. ( NASA Goddard Space Flight Ctr. (USA) and Raytheon Carp. (USA) )

Sappington, C. ( NASA Goddard Space Flight Ctr. (USA) )

Schulte, E. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

Schwinger, S. ( NASA Goddard Space Flight Ctr. (USA) )

Smith, W. ( NASA Goddard Space Flight Ctr. (USA) and Orbital Science Carp. (USA) )

Snodgrass, S. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

Sparr, L. M. ( NASA Goddard Space Flight Ctr. (USA) )

Steptoe-Jackson, R. ( NASA Goddard Space Flight Ctr. (USA) )

Wang, L. L. ( NASA Goddard Space Flight Ctr. (USA) and Swales Aerospace Co. (USA) )

Zheng, Y. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

Zincke, C. A. ( NASA Goddard Space Flight Ctr. (USA) and QSS Group, Inc. (USA) )

31 more

Publication title:

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5650

Pub. Year:

2004

Page(from):

9

Page(to):

16

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456106 [0819456101]

Language:

English

Call no.:

P63600/5650

Type:

Conference Proceedings