The fabrication of devices in silicon using scanning probe microscopy

The fabrication of devices in silicon using scanning probe microscopy

Author(s):

RueB, F. J. ( Univ. of New South Wales (Australia) )

Oberbeck, L. ( Univ. of New South Wales (Australia) )

Simmons, M. Y. ( Univ. of New South Wales (Australia) )

Goh, K. E. J. ( Univ. of New South Wales (Australia) )

R. Hamilton, A. ( Univ. of New South Wales (Australia) )

Hallam, T. ( Univ. of New South Wales (Australia) )

Curson, N. J. ( Univ. of New South Wales (Australia) )

Clark, R. G. ( Univ. of New South Wales (Australia) )

3 more

Publication title:

Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5649

Pub. Year:

2004

Page(from):

306

Page(to):

310

Pages:

5

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456090 [0819456098]

Language:

English

Call no.:

P63600/5649-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014865
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart structures, devices, and systems
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Sydney, Australia
Conf. info. (Date):	2004.12.13-2004.12.15

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