Technology interfaces to microsystem and nanoelectronic processes

Technology interfaces to microsystem and nanoelectronic processes

Author(s):

Schmidt, T. ( Univ. of Siegen (Germany) )
Wagener, A. ( Univ. of Siegen (Germany) )
Popp, J. ( Univ. of Siegen (Germany) )
Hahn, K. ( Univ. of Siegen (Germany) )

Publication title:

Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5649

Pub. Year:

2004

Page(from):

288

Page(to):

296

Pages:

9

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456090 [0819456098]

Language:

English

Call no.:

P63600/5649-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014865
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart structures, devices, and systems
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Sydney, Australia
Conf. info. (Date):	2004.12.13-2004.12.15

Similar Items:

1 Conference Proceedings MEMS fabrication process management environment Popp, J., Schmidt, T., Wagener, A., Hahn, K. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Optimization of MEMS fabrication process design by virtual experiments T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brueck SPIE - The International Society of Optical Engineering
2 Conference Proceedings Process design environment for microfabrication technologies Wagener, A., Popp, J., Hahn, K. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Management and verification for MEMS fabrication processes [6186-27] Schmidt T., Ortloff D., Hahn K., Wagener A., Popp J., Bruck R. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Process management and design for MEMS and microelectronics technologies Hahn, K., Popp, J., Wagener, A. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Process design and tracking support for MEMS [6109-08] Wagener, A., Schmidt, T., Popp, J., Hahn, K., Bruck, R., Ortloff, D. SPIE - The International Society of Optical Engineering
4 Conference Proceedings CAD tool environment for MEMS process design support Schmidt, T., Wagener, A., Popp, J., Hahn, K., Bruck, R. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Verification of thin film processes in a virtual fabrication environment T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Bruck, A. Hossinger SPIE - The International Society of Optical Engineering
5 Conference Proceedings Knowledge-based process simulation and design system for MEMS [6035-38] Popp J., Schmidt T., Wagener A., Hahn K., Bruck R., Hossinger A. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Nanoelectronics on Semiconductor/Solution Interfaces Wiesbeck, W., Hugelmann, Ph., Hugelmann, M., Lorenz, W.J. Electrochemical Society
6 Conference Proceedings MEMS product engineering using fabrication process development tools K. Hahn, T. Schmidt, D. Ortloff, J. Popp, A. Wagener Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Component-based assiatants for MEMS design tools Hahn,K., Bruck,R., Schneider,C., Schumer,C., Popp,J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12