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Hybrid nanocontact printing (HnCP) process technology

Author(s):
  • Jo, J. ( Korea Institute of Machinery and Materials (South Korea) )
  • Jeong, J.-H. ( Korea Institute of Machinery and Materials (South Korea) )
  • Kim, K.-Y. ( Korea Institute of Machinery and Materials (South Korea) )
  • Lee, E.-S. ( Korea Institute of Machinery and Materials (South Korea) )
  • Choi, C.-G. ( Electronics and Telecommunications Research Institute (South Korea) )
Publication title:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
Pub. Year:
2004
Page(from):
372
Page(to):
378
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456007 [0819456004]
Language:
English
Call no.:
P63600/5645
Type:
Conference Proceedings

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