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The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication

Author(s):
Qiu, Y. ( Institute of Microelectronics, CAS (China) )
Chen, B. ( Institute of Microelectronics, CAS (China) )
Liu, M. ( Institute of Microelectronics, CAS (China) )
Xu, Q. ( Institute of Microelectronics, CAS (China) )
Xue, L. ( Institute of Microelectronics, CAS (China) )
Ren, L. ( Institute of Microelectronics, CAS (China) )
Hu, Y. ( Institute of Microelectronics, CAS (China) )
Long, S. ( Institute of Microelectronics, CAS (China) )
Lu, J. ( Institute of Microelectronics, CAS (China) )
Kong, X. ( Institute of Microelectronics, CAS (China) )
Li, L. ( Institute of Microelectronics, CAS (China) )
Li, J. ( Institute of Microelectronics, CAS (China) )
Tang, Y. ( Institute of Microelectronics, CAS (China) )
8 more
Publication title:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
Pub. Year:
2004
Page(from):
353
Page(to):
364
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456007 [0819456004]
Language:
English
Call no.:
P63600/5645
Type:
Conference Proceedings

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