The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication
- Author(s):
Qiu, Y. ( Institute of Microelectronics, CAS (China) ) Chen, B. ( Institute of Microelectronics, CAS (China) ) Liu, M. ( Institute of Microelectronics, CAS (China) ) Xu, Q. ( Institute of Microelectronics, CAS (China) ) Xue, L. ( Institute of Microelectronics, CAS (China) ) Ren, L. ( Institute of Microelectronics, CAS (China) ) Hu, Y. ( Institute of Microelectronics, CAS (China) ) Long, S. ( Institute of Microelectronics, CAS (China) ) Lu, J. ( Institute of Microelectronics, CAS (China) ) Kong, X. ( Institute of Microelectronics, CAS (China) ) Li, L. ( Institute of Microelectronics, CAS (China) ) Li, J. ( Institute of Microelectronics, CAS (China) ) Tang, Y. ( Institute of Microelectronics, CAS (China) ) - Publication title:
- Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5645
- Pub. Year:
- 2004
- Page(from):
- 353
- Page(to):
- 364
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456007 [0819456004]
- Language:
- English
- Call no.:
- P63600/5645
- Type:
- Conference Proceedings
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