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The advanced nanofabrication technology

Author(s):
Liu, M. ( Institute of Microelectronics, CAS (China) )
Xu, Q. ( Institute of Microelectronics, CAS (China) )
Chen, B. ( Institute of Microelectronics, CAS (China) )
Xie, C. ( Institute of Microelectronics, CAS (China) )
Ye, T. ( Institute of Microelectronics, CAS (China) )
Liu, X. ( Institute of Microelectronics, CAS (China) )
1 more
Publication title:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
Pub. Year:
2004
Page(from):
275
Page(to):
282
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456007 [0819456004]
Language:
English
Call no.:
P63600/5645
Type:
Conference Proceedings

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