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Silicon microhole array prepared by ICP

Author(s):
Duanmu, Q. ( Changchun Univ. of Science and Technology (China) )
Zhang, A. ( Changchun Univ. of Science and Technology (China) )
Wang, G. ( Changchun Univ. of Science and Technology (China) )
Gao, Y. ( Changchun Univ. of Science and Technology (China) )
Li, Y. ( Changchun Univ. of Science and Technology (China) )
Jiang, D. ( Changchun Univ. of Science and Technology (China) )
Fu, L. ( Changchun Univ. of Science and Technology (China) )
Tian, J. ( Changchun Univ. of Science and Technology (China) )
3 more
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
344
Page(to):
347
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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