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Study on optical parts of MOEMS optical switch with low-insertion loss

Author(s):
Ming, A. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )
Liang, J. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )
Lan, W. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )
Dong, W. ( Jilin Univ. (China) )
Yao, J. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )
Wang, W. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )
Le, Z. ( Zhejiang Univ. of Technology (China) )
Chen, W. ( Jilin Univ. (China) )
Wang, L. ( Changchun institute of Optics, Fine Mechanics and Physics, CAS (China) )
4 more
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
323
Page(to):
332
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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