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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

Author(s):
  • Li, M. ( Nanjing Normal Univ. (China) )
  • Wang, M. ( Nanjing Normal Univ. (China) )
  • Wang, T. ( Nanjing Normal Univ. (China) )
  • Rong, H. ( Nanjing Normal Univ. (China) )
  • Chen, X. ( Nanjing Normal Univ. (China) )
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
238
Page(to):
245
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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