Development of microfabrication technology for MEMS/MOEMS applications (Invited Paper)

Development of microfabrication technology for MEMS/MOEMS applications (Invited Paper)

Author(s):: Cui, Z. ( Rutherford Appleton Lab. (United Kingdom) )
Publication title:: MEMS/MOEMS Technologies and Applications II
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 5641
Pub. Year:: 2004
Page(from):: 179
Page(to):: 187
Pages:: 9
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819455963 [0819455962]
Language:: English
Call no.:: P63600/5641
Type:: Conference Proceedings

Details

TDL ID:	ZA00014856
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS Technologies and Applications
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.10-2004.11.12

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