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Silicon scanning mirror with 54.74° slanted reflective surface for fluorescence scanning system

Author(s):
Lee, K.-N. ( Seoul National Univ. (South Korea) )
Jang, Y.-H. ( Seoul National Univ. (South Korea) )
Choi, J. ( Chung Ang Univ. (South Korea) )
Kim, H. ( Chung Ang Univ. (South Korea) )
Lee, Y.-S. ( Seoul National Univ. (South Korea) )
Kim, Y.-K. ( Seoul National Univ. (South Korea) )
1 more
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
56
Page(to):
66
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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