VUV and soft x-ray diffraction grating fabrication by holographic ion beam etching
- Author(s):
- Publication title:
- Holography, diffractive optics, and applications II : 8-11 November 2004, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5636
- Pub. Year:
- 2004
- Page(from):
- 165
- Page(to):
- 175
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455918 [0819455911]
- Language:
- English
- Call no.:
- P63600/5636-1
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Fabrication of self-supporting transmission gratings for plasma diagnostics
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source
Society of Photo-optical Instrumentation Engineers |
8
Conference Proceedings
The splitter grating used in the soft x-ray laser interferometer for plasma diagnosis
Society of Photo-optical Instrumentation Engineers |
3
Conference Proceedings
Reactive ion beam etching of multilayer diffraction gratings with SiO2 as the top layer
Society of Photo-optical Instrumentation Engineers |
9
Conference Proceedings
Fabrication of waveguide grating coupler with double corrugation by ion-beam etching technology
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
10
Conference Proceedings
Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy
Society of Photo-optical Instrumentation Engineers |
5
Conference Proceedings
Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |