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Nanoscanning method for high-density grating measurement

Author(s):
  • Luo, H. ( Shanghai Institute of Optics and Fine Mechanics (China) )
  • Zhou, C. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Publication title:
Nanophotonics, Nanostructure, and Nanometrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5635
Pub. Year:
2004
Page(from):
238
Page(to):
245
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455901 [0819455903]
Language:
English
Call no.:
P63600/5635
Type:
Conference Proceedings

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