Fast data acquisition in imaging ellipsometry using tour-frame method

Fast data acquisition in imaging ellipsometry using tour-frame method

Author(s):

Chegal, W. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, Y. J. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, H. M. ( Korea Research Institute of Standards and Science (South Korea) )
Lee, Y. W. ( Korea Research Institute of Standards and Science (South Korea) )
Kim, S. H. ( Korea Advanced Institute of Science and Technology (South Korea) )

Publication title:

Advanced sensor systems and applications II : 8-12 November 2004, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5634

Pub. Year:

2004

Page(from):

839

Page(to):

848

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455895 [081945589X]

Language:

English

Call no.:

P63600/5634-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014847
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Advanced sensor systems and applications
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.08-2004.11.12

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