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Holographic lithography for electroforming submicrometric structures

Author(s):
Publication title:
RIAO/OPTILAS 2004: 5th Iberoamerican meeting on optics and 8th Latin American meeting on optics, lasers, and their applications: ICO regional meeting : 3-8 October 2004, Porlamar, Isla de Margarita, Venezuela
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5622
Pub. Year:
2004
Page(from):
755
Page(to):
759
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455758 [081945575X]
Language:
English
Call no.:
P63600/5622-2
Type:
Conference Proceedings

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