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Microstructured surface element for high-accuracy position measurement by vision and phase measurement

Author(s):
  • Sandoz, P. ( Institut FEMTO-ST, CNRS and Univ. de Franche-Comte (France) )
  • Trolard, B. ( Institut FEMTO-ST, CNRS and Univ. de Franche-Comte (France) )
  • Marsaut, D. ( Institut FEMTO-ST, CNRS and Univ. de Franche-Comte (France) )
  • Gharbi, T. ( Institut FEMTO-ST, CNRS and Univ. de Franche-Comte (France) )
Publication title:
RIAO/OPTILAS 2004: 5th Iberoamerican meeting on optics and 8th Latin American meeting on optics, lasers, and their applications: ICO regional meeting : 3-8 October 2004, Porlamar, Isla de Margarita, Venezuela
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5622
Pub. Year:
2004
Page(from):
606
Page(to):
611
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455758 [081945575X]
Language:
English
Call no.:
P63600/5622-2
Type:
Conference Proceedings

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