Scanning micromirrors: an overview (Invited Paper)

Scanning micromirrors: an overview (Invited Paper)

Author(s):

Patterson, P. R. ( HRL Labs., LLC (USA) )
Hah, D. ( Univ. of California/Los Angeles (USA) )
Fujino, M. ( Topcon Corp. (Japan) )
Piyawattanametha, W. ( Univ. of California/Los Angeles (USA) )
Wu, M. C. ( Univ. of California/Los Angeles (USA) )

Publication title:

Optomechatronic Micro/Nano Components, Devices, and Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5604

Pub. Year:

2004

Page(from):

195

Page(to):

207

Pages:

13

Pub. info.:

SPIE - The International Society of Optical Engineering

ISSN:

0277768X

ISBN:

9780819455574 [0819455571]

Language:

English

Call no.:

P63600/5604

Type:

Conference Proceedings

Details

TDL ID:	ZA00014810
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Optomechatronic Micro/Nano Components, Devices, and Systems
Conf. info. (Number):	2004
Conf. info. (Venue):	Philadelphia, PA, USA
Conf. info. (Date):	2004.10.27-2004.10.28

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