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Designing MEMS for manufacturing (Invited Paper)

Author(s):
  • Wolter, A. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
  • Herrman, A. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
  • Yildiz, G. ( Koc Univ. (Turkey) )
  • Schenk, H. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
  • Lakner, H. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Publication title:
Optomechatronic Micro/Nano Components, Devices, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5604
Pub. Year:
2004
Page(from):
74
Page(to):
85
Pages:
12
Pub. info.:
SPIE - The International Society of Optical Engineering
ISSN:
0277768X
ISBN:
9780819455574 [0819455571]
Language:
English
Call no.:
P63600/5604
Type:
Conference Proceedings

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