Tunable stiffness scanning microscope probe
- Author(s):
- Mueller-Falcke, C. ( Massachusetts Institute of Technology (USA) )
- Song, Y. -A. ( Massachusetts Institute of Technology (USA) )
- Kim, S. -G. ( Massachusetts Institute of Technology (USA) )
- Publication title:
- Optomechatronic Micro/Nano Components, Devices, and Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5604
- Pub. Year:
- 2004
- Page(from):
- 31
- Page(to):
- 37
- Pages:
- 7
- Pub. info.:
- SPIE - The International Society of Optical Engineering
- ISSN:
- 0277768X
- ISBN:
- 9780819455574 [0819455571]
- Language:
- English
- Call no.:
- P63600/5604
- Type:
- Conference Proceedings
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