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Development of a nanoindenter using a piezoelectric actuator

Author(s):
  • Park, H. -K. ( Michigan Technological Univ. (USA) )
  • Hong, Y. K. ( Michigan Technological Univ. (USA) )
  • Lee, S. Q ( Electronics and Telecommunications Research Institute (South Korea) )
  • Moon, K. S. ( Michigan Technological Univ. (USA) )
  • Kwon, D. ( Seoul National Univ. (South Korea) )
Publication title:
Optomechatronic Sensors, Actuators, and Control
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5602
Pub. Year:
2004
Page(from):
115
Page(to):
121
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455550 [0819455555]
Language:
English
Call no.:
P63600/5602
Type:
Conference Proceedings

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