Blank Cover Image

Megasonic enhanced KOH etching for {11O} silicon bulk micromachining

Author(s):
Publication title:
Optomechatronic Sensors, Actuators, and Control
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5602
Pub. Year:
2004
Page(from):
27
Page(to):
34
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455550 [0819455555]
Language:
English
Call no.:
P63600/5602
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Optical MEMS devices based on wet anisotropic etching of silicon

Hoffmann, M., Niisse, D., Voges, E.

Electrochemical Society
7 Conference Proceedings Silicon planar parabolic lenses

Aristov,V.V., Grigoriev,M., Kuznetsov,S., Shabelnikov,L., Yunkin,V., Rau,C., Snigirev,A.A., Snigireva,I., Weitkamp,T., …

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Reflectivity of micromachined{111}-oriented silicon mirrors for optical input/output couplers

Sadler,D.J., Garter,M.J., Ahn,C.H., Koh,S., Cook,A.L.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Latching-type 2×2 and 1×4 fiber optic switches

Kopka,P., Hoffmann,M., Voges,E.I.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Optical scattering enhanced by silicon micromachined surfaces

D.M. Sowders, V.M. Bright, E.S. Kolesar

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Micro-nanosystems by bulk silicon micromachining (Plenary Paper)

Esashi, M

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Etching Simulator for Bulk Micromachining in Java Platform

Martinazzo, F., Konzen, A., Togni, J.D., Reis, A.I., Ribas, R.P.

Electrochemical Society
10 Conference Proceedings An Examination of Chemical Etching and Staining of Silicon During Micromachining

Soorikumar, K., Kalkur, T.S., McIntyre, D., Gooch, L.

Electrochemical Society
5 Conference Proceedings Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation

Snigireva, I., Yunkin, V., Kuznetsov, S., Grigoriev, M., Chukalina, M., Shabel'nikov, L., Snigirev, A., Hoffmann, M., …

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Characterization of bulk-micromachined direct-bonded silicon nanofilters

Tu,J.K., Huen,T., Szema,R., Ferrari,M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Studies of the Relationship Between Megasonics, Surface Etching, and Particle Removal in SC-1 Solutions

Cohen, S. L., Rath, D., Lee, G., Furman, B., Pope, K. R., Tsai, R., Syverson, W., Gow, C., Liehr, M.

MRS - Materials Research Society
12 Conference Proceedings X-ray refractive collimator based on planar silicon lens

Snigireva, I., Grigoriev, M., Shabel'nikov, L., Yunkin, V., Snigirev, A.A., Kuznetsov, S., Di Michiel, M., Hoffmann, M., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12