Role of laser pulse duration and ambient nitrogen pressure in deposition of AIN thin films

Role of laser pulse duration and ambient nitrogen pressure in deposition of AIN thin films

Author(s):

Ristoscu, C. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )

Dorcioman, C. G. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )

Socol, G. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )

Mihailescu, I. N. ( National Institute for Laser, Plasma, and Radiation Physics (Romania) )

Klini, A. ( Foundation for Research and Technology-Hellas (Greece) )

Fotakis, C. ( Foundation for Research and Technology-Hellas (Greece) )

1 more

Publication title:

ROMOPTO 2003, Seventh Conference on Optics, 8-11 September 2003, Constanta, Romania

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5581

Pub. Year:

2004

Page(from):

356

Page(to):

362

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455345 [0819455342]

Language:

English

Call no.:

P63600/5581

Type:

Conference Proceedings

Details

TDL ID:	ZA00014787
Series ID:	PA00000029
Conf. info. (Name):	ROMOPTO - Conference on Optics
Conf. info. (Number):	2003 : 7th
Conf. info. (Venue):	Constanta, Romania
Conf. info. (Date):	2003.09.08-2003.09.11

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