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Formation of densely populated SiOx microtree-like structures on the Si (1OO) surface using excimer laser irradiation in air

Author(s):
  • Yang, D. -Q. ( Ecole Polytechnique de Montreal (Canada) )
  • Sacher, E. ( Ecole Polytechnique de Montreal (Canada) )
  • Meunier, M. ( Ecole Polytechnique de Montreal (Canada) )
Publication title:
Applications of photonic technology [7B] : closing the gap between theory, development, and application : 7B--Photonics North 2004: Photonic applications in astronomy, biomedicine, imaging, materials processing, and education
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5578
Pub. Year:
2004
Page(from):
652
Page(to):
657
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455277 [081945527X]
Language:
English
Call no.:
P63600/5578-2
Type:
Conference Proceedings

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