Closing the defect printability loop: optimizing defect specifications for an established lithographic process

Closing the defect printability loop: optimizing defect specifications for an established lithographic process

Author(s):

Patterson, K. ( Freescale Semiconducteurs Ctr. de Recherches Crolles SAS (France) )

Wakefield, C. ( Photronics, Inc. (United Kingdom) )

Sixt, P. ( Photronics, Inc. (France) )

Sundermann, F. ( STMicroelectronics (France) )

Trouiller, Y. ( CEA-LETI (France) )

Belledent, J. ( Philips Semiconductors (France) )

Couderc, C. ( Philips Semiconductors (France) )

Rody, Y. ( Philips Semiconductors (France) )

Lucas, K. ( Freescale Semiconducteurs Ctr. de Recherches Crolles SAS (France) )

4 more

Publication title:

24th Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5567

Pub. Year:

2004

Page(from):

1076

Page(to):

1082

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455130 [081945513X]

Language:

English

Call no.:

P63600/5567-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014770
Series ID:	PA00000029
Conf. info. (Name):	Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2004 : 24th
Conf. info. (Venue):	Monterey, CA, USA
Conf. info. (Date):	2004.09.14-2004.09.17

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