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Development of new chrome blanks for 65-nm node and beyond

Author(s):
Hashimoto, M. ( Hoya Corp. (Japan) )
Yamada, T. ( Hoya Corp. (Japan) )
Sakamoto, M. ( Hoya Corp. (Japan) )
Hara, M. ( Hoya Corp. (Japan) )
Ohkubo, Y. ( Hoya Corp. (Japan) )
Ushida, M. ( Hoya Corp. (Japan) )
1 more
Publication title:
24th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567
Pub. Year:
2004
Page(from):
974
Page(to):
982
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
Language:
English
Call no.:
P63600/5567-2
Type:
Conference Proceedings

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