High-resolution actinic imaging and phase metrology of 193-nm CPL reticles
- Author(s):
Merriam, A. J. ( Actinix (USA) ) Jacob, J. J. ( Actinix (USA) ) Van Den Broeke, D. ( ASML MaskTools, Inc. (USA) ) Hsu, S. ( ASML MaskTools, Inc. (USA) ) Chen, J. F. ( ASML MaskTools, Inc. (USA) ) Kasprowicz, B. ( Photronics Inc. (USA) ) - Publication title:
- 24th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5567
- Pub. Year:
- 2004
- Page(from):
- 894
- Page(to):
- 904
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455130 [081945513X]
- Language:
- English
- Call no.:
- P63600/5567-2
- Type:
- Conference Proceedings
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