Actinic detection and signal characterization of multilayer defects on EUV mask blanks

Actinic detection and signal characterization of multilayer defects on EUV mask blanks

Author(s):

Tezuka, Y. ( MIRAl-ASET (Japan) )
Ito, M. ( MIRAl-ASET (Japan) )
Terasawa, T. ( MIRAl-ASET (Japan) )
Tomie, T. ( MIRAl-ASRC, AIST (Japan) )

Publication title:

24th Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5567

Pub. Year:

2004

Page(from):

791

Page(to):

799

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455130 [081945513X]

Language:

English

Call no.:

P63600/5567-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014770
Series ID:	PA00000029
Conf. info. (Name):	Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2004 : 24th
Conf. info. (Venue):	Monterey, CA, USA
Conf. info. (Date):	2004.09.14-2004.09.17

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