Genetic algorithms for geometry optimization in lithographic imaging systems

Genetic algorithms for geometry optimization in lithographic imaging systems

Author(s):

Fuhner, T. ( Fraunhofer Institute of Integrated Systems and Device Technology (Germany) )
Erdmann, A. ( Fraunhofer Institute of Integrated Systems and Device Technology (Germany) )
Schnattinger, T. ( Fraunhofer Institute of Integrated Systems and Device Technology (Germany) )

Publication title:

Applications of digital image processing XXVII : 2-6 August 2004, Denver, Colorado, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5558

Pub. Year:

2004

Page(from):

29

Page(to):

40

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819454966 [0819454966]

Language:

English

Call no.:

P63600/5558-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00014759
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Applications of digital image processing
Conf. info. (Number):	2004 : 27th
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	2004.08.02-2004.08.06

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