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Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry

Author(s):
Kim, H.J. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, Y.J. ( Korea Research Institute of Standards and Science (South Korea) )
Cho, H.M. ( Korea Research Institute of Standards and Science (South Korea) )
Chegal, W. ( Korea Research Institute of Standards and Science (South Korea) )
Lee, Y.W. ( Korea Research Institute of Standards and Science (South Korea) )
Kim, S.Y. ( Ajou Univ. (South Korea) )
1 more
Publication title:
Optical constants of materilas for UV to x-ray wavelengths : 4-5 August 2004, Denver, Colorado, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5538
Pub. Year:
2004
Page(from):
165
Page(to):
171
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454768 [0819454761]
Language:
English
Call no.:
P63600/5538
Type:
Conference Proceedings

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