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Three-dimensional range sensing and surface profilometry using lateral shearing interferometry

Author(s):
  • Mehta, D.S. ( Indian Institute of Technology Delhi (India) )
  • Singh, P. ( Indian Institute of Technology Delhi (India) )
  • Faridi, M.S. ( Indian Institute of Technology Delhi (India) )
  • Mirza, S. ( Indian Institute of Technology Delhi (India) )
  • Shakher, C. ( Indian Institute of Technology Delhi (India) and National Institute of Technology, Hamirpur (India) )
Publication title:
Interferometry XII: Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5532
Pub. Year:
2004
Page(from):
128
Page(to):
135
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454706 [0819454702]
Language:
English
Call no.:
P63600/5532
Type:
Conference Proceedings

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