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Tomographic microinterferometry as a measurement tool for 3D micro-optical phase elements (Invited Paper)

Author(s):
Publication title:
Interferometry XII: Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5532
Pub. Year:
2004
Page(from):
96
Page(to):
105
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454706 [0819454702]
Language:
English
Call no.:
P63600/5532
Type:
Conference Proceedings

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