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LVDT calibration using a phase modulation optical interferometer calibrated by an x-ray interferometer

Author(s):
  • Park, J.W. ( Korea Research Institute of Standards and Science (South Korea) )
  • Jo, J.G. ( Korea Research Institute of Standards and Science (South Korea) )
  • Byun, S.H. ( Korea Research Institute of Standards and Science (South Korea) )
  • Kim, J.E. ( Korea Research Institute of Standards and Science (South Korea) )
  • Eom, C.I. ( Korea Research Institute of Standards and Science (South Korea) )
Publication title:
Interferometry XII: Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5532
Pub. Year:
2004
Page(from):
28
Page(to):
36
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454706 [0819454702]
Language:
English
Call no.:
P63600/5532
Type:
Conference Proceedings

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