Blank Cover Image

Study and characterization of a MEMS micromirror device

Author(s):
Publication title:
Interferometry XII: Techniques and Analysis
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5531
Pub. Year:
2004
Page(from):
54
Page(to):
63
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454690 [0819454699]
Language:
English
Call no.:
P63600/5531
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization of shape and deformation of MEMS by quantitative optoelectronic metrology techniques

Furlong, C., Pryputniewicz, R.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Hybrid,experimental and computational,investigation of mechanical components

Furlong,C., Pryputniewicz,R.J.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings New optomechanical approach to quantitative characterization of fatigue behavior of dynamically loaded structures

C. Furlong, R.J. Pryputniewicz

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Novel optoelectronic methodology for testing MOEMS (Invited Paper)

Pryputniewicz, R.J., Furlong, C.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Optomechanical study and optimization of cantilever plate dynamics

C. Furlong, R.J. Pryputniewicz

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Speckle noise reduction in quantitative optical metrology techniques by application of the discrete wavelet transformation

Furlong, C., Pryputniewicz, R.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Hybrid optical-computational methodology for studies and optimization of microelectronic components

Furlong,C., Pryputniewicz,R.J.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Computational and Experimental Approach to study of a Nanoindentation Process for MEMS

Furlong, Cosme, Pryputniewicz, Dariusz R., Pryputniewicz, Ryszard

IMAPS
5 Conference Proceedings Analytical and Experimental Characterization of an Optical MEMS Device

Pryputniewicz, Ryszard J., Furlong, Cosme, Pryputniewicz, Emily J.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings ACES Characterization of Surface Micromachined Microfluidic Devices

Pryputniewicz,Ryszard, Brown,Gordon C., Furlong,Cosme, Pryputniewicz,Emily J., Galambos,Paul

IMAPS
6 Conference Proceedings Electro-optic holography method for determination of surface shape and deformation

Furlong,C., Pryputniewicz,R.J.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Sensitivity, accuracy, and precision issues in opto-electronic holography based on fiber optics and high-spatial- and high-digitial-resolution cameras

Furlong, C., Yokum, J.S., Pryputniewicz, R.J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12