Design considerations and validation of the MSTAR absolute metrology system

Design considerations and validation of the MSTAR absolute metrology system

Author(s):

Peters, R.D. ( Jet Propulsion Lab. (USA) )
Lay, O.P. ( Jet Propulsion Lab. (USA) )
Dubovitsky, S. ( Jet Propulsion Lab. (USA) )
Burger, J. ( Jet Propulsion Lab. (USA) )
Jeganathan, M. ( Jet Propulsion Lab. (USA) )

Publication title:

Interferometry XII: Techniques and Analysis

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5531

Pub. Year:

2004

Page(from):

32

Page(to):

43

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819454690 [0819454699]

Language:

English

Call no.:

P63600/5531

Type:

Conference Proceedings

Details

TDL ID:	ZA00014732
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Interferometry
Conf. info. (Number):	2004 : 12th
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	2004.08.02-2004.08.03

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